| 類型 | Front Load Dual Sensor |
| 無水時的烘烤溫度 | | 130° C |
| 小水流時的工作等溫環(huán)境溫度 | | 400 ° C |
| 尺寸（無閘門的大外殼） | | 1.54 in. x 3.23 in. x 1.95 in. (39.12 mm x 82.04 mm x 49.54 mm) |
| 水管和同軸長度，“E”傳感器 | | Standard 30 in. (762 mm) |
| 晶體交換 | | Front-loading, self-contained package for ease of exchange. Shutter flips up to ease access to the holders. |
| 安裝 | | Two #4-40 tapped holes on the back of the sensor body |
| 安裝要求 | |
| 饋入件 | | Qty. (1) 2¾ in. (69.85 mm) ConFlat® with 2 Microdot®, 2 pass water and air, or Qty. (1) 1 in. (25.4 mm) bolt with 2 Microdot, 2 pass water and air. |
| 其他 | | 1) Valve assembly for air—IPN 750-420-G1 2) Two oscillators or one oscillator and 779-220-G1 CrystalTwo Switch designed to interface with the deposition controller. 3) For automatic operation, the deposition process controller must be designed for the implementation of this feature. |
| 實用工具 | | 1) Minimum water flow 150-200 cc/min, 30°C max (Do not allow to freeze.) 2) Air, 80 PSIG (5.5 bar) [552 kPa] very low volume, DO NOT EXCEED 110 PSIG (7.6 bar) [760 kPa] |
| 水質(zhì) | | Coolant should not contain chlorides as stress corrosion cracking may occur. Extremely dirty water may result in loss of cooling capacity. |
| 材料 | |
| 主體和支架 | | 304 Type stainless steel |
| 彈簧 | | Au plated Be-Cu |
| 水管 | | S-304, 0.125 in. (3.175 mm) OD x 0.015 in. (0.381 mm) Wall thickness seamless stainless steel tubing |
| 連接器 (Microdot) | | Stainless steel, Teflon® and glass insulated |
| 絕緣體 | | >99% Al2O3 |
| 電線 | | Teflon insulated copper |
| 其他機械部件 | | 304 or 18-8 stainless steel |
| 銅焊 | | Vacuum process high temperature Ni-Cr alloy |
| 晶體 | | 0.550 in. (13.97 mm) diameter |
| 1 in. 螺栓和 Ultra-Torr（壓縮接頭）端接的饋入件規(guī)格： | |
| 材料 | | 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON® |
| 溫度 | | Operational environment to 300oC with water cooling or 165° C without |
| 安裝 | | 1.015 in. ±0.010 in. diameter aperture |
| CF 40 (2 3/4 in. ConFlat) 焊接式端接饋入件規(guī)格： | |
| 材料 | | 304 stainless steel, Teflon, ceramic, beryllium nickel |
| 溫度 | | Operational environment to 450° C with water cooling or 165° C without |
| 安裝 | | Mates with 2 ? in. ConFlat type flanges with 1.375 in. I.D. min. |
