新型肖特基場(chǎng)發(fā)射掃描電鏡SU7000
－可獲得樣品的各種信息，實(shí)現(xiàn)高通量分析－
肖特基場(chǎng)發(fā)射掃描電鏡SU7000，它縮短了通過(guò)采集多種信號(hào)獲取樣品多種信息的時(shí)間，真正實(shí)現(xiàn)了高通量的觀察與分析。
SU7000外觀圖
掃描電子顯微鏡（SEM）可通過(guò)檢測(cè)樣品激發(fā)出的二次電子、背散射電子、X射線等信號(hào)，獲得從微細(xì)結(jié)構(gòu)到組成成分等各種信息，因此被廣泛應(yīng)用于納米技術(shù)、半導(dǎo)體、電子器件、生物、材料等諸多領(lǐng)域。隨著SEM的應(yīng)用范圍在不斷擴(kuò)大，對(duì)觀察時(shí)間的縮短、信號(hào)的迅速高效采集提出了更進(jìn)一步的需求。
SU7000采用全新設(shè)計(jì)的探測(cè)器，使得對(duì)二次電子信號(hào)、背散射電子信號(hào)的檢測(cè)以及分離能力大大提升。以前我們要根據(jù)獲得的信號(hào)來(lái)調(diào)整樣品與透鏡之間的距離（工作距離／以下簡(jiǎn)稱(chēng)WD），以設(shè)置合適的觀察與分析條件，而SU7000通過(guò)新研發(fā)的樣品倉(cāng)以及檢測(cè)器系統(tǒng)，可在不改變WD的條件下更高效地接收各種信號(hào)，縮短了樣品觀察和分析的時(shí)間，提高了測(cè)試效率。
而且，SU7000還配置了可同時(shí)6通道顯示界面（前代機(jī)型只能同時(shí)顯示4通道），進(jìn)一步升級(jí)SEM控制系統(tǒng)，大幅提高了信號(hào)獲取速度，由此實(shí)現(xiàn)了樣品的高通量觀察。
它還標(biāo)配超大樣品倉(cāng)，增設(shè)了附件接口，可適用于各種樣品的觀察與分析。
日立*將在8月5日（星期日）～8月9日（星期四）在美國(guó)馬里蘭州舉辦的“Microscopy & Microanalysis”及9月5日（星期三）～9月7日（星期五）在幕張展示中心（千葉縣千葉市）舉辦的“JASIS 2018”上展示這款SU7000，預(yù)計(jì)每年銷(xiāo)量有望達(dá)150臺(tái)。
日立*科學(xué)系統(tǒng)事業(yè)部以2020年成為電子顯微鏡行業(yè)為中期戰(zhàn)略目標(biāo)，今后仍將全力推動(dòng)產(chǎn)品研發(fā)與市場(chǎng)推廣，努力為制造業(yè)作出更大的貢獻(xiàn)。作為*、前沿的事業(yè)創(chuàng)新型企業(yè)，今后以成為提供*和解決方案的企業(yè)為目標(biāo)，始終站在客戶(hù)的立場(chǎng)，快速滿(mǎn)足客戶(hù)和市場(chǎng)需求。
【主要特點(diǎn)】
1．在相同WD的條件下，可同時(shí)實(shí)現(xiàn)二次電子、背散射電子觀察與X射線分析
2．多可同時(shí)實(shí)現(xiàn)6通道檢測(cè)與顯示
3．在大像素10,240 x 7,680時(shí)，也可獲得圖像數(shù)據(jù)
4．同級(jí)別*設(shè)備中多的可配置18個(gè)附件接口
5．支持低300Pa的低真空模式（選配）
*空間分辨率在1 nm/1 kV以下
【主要規(guī)格】
產(chǎn)品名稱(chēng) | SU7000 |
電子源 | ZrO/W熱場(chǎng)發(fā)射（肖特基熱場(chǎng)發(fā)射） |
二次電子分辨率 | 0.8 nm（加速電壓 15 kV） 0.9 nm（加速電壓 1 kV） |
加速電壓 | 0.1～30 kV |
放大倍率 | 20～2,000,000倍 |
束流 | 大200 nA |
樣品臺(tái) | X/Y/Z : 135 x 100 x 40 （mm） |
Key Concept
- Versatile Imaging Capability
The SU7000 excels in fast acquisition of multiple signals to address expansive SEM needs, from imaging a wide field of view to visualizing sub-nanometer structures and everything in between.
The incorporation of newly designed electron optics and detection systems allows for efficient simultaneous acquisition of multiple secondary electron and back-scattered electron signals. - Multi-Channel Imaging
The number of the detectors mounted on the SEM is ever increasing, along with the need to display all collected information effectively.
The SU7000 is capable of processing, displaying, and saving up to 6 signals simultaneously to maximize information acquisition. - Wide Variety of Observation Techniques
The specimen chamber and the vacuum system are optimized for:
?Large specimen size
?Sample manipulation at various axes
?Variable pressure conditions
?Cryogenic conditions
?Heating and cooling in-situ observation - Microanalysis
The electron gun is equipped with a Schottky emitter that provides up to 200 nA beam current to accommodate various microanalysis applications.
The specimen chamber and port layout are designed to incorporate multiple analytical options including EDX, WDX, EBSD, cathodoluminescence, and more.
The SU7000 with the combination of numerous analytical accessories unifies multi-discipline techniques in a single platform.
Imaging Performance
Enhanced Information Acquisition
The advanced detection system of the SU7000 streamlines acquisition of structural, topographical, compositional, crystallographic, and other types of information by minimizing changes to microscope conditions, such as working distance or accelerating voltage.
Single-Scan Multi-Signal ImagingSpecimen: Organic-coated gold rods
Specimen courtesy of: Mr. Smart and Ms. Je Chemistry Dept.,
Vassar College
Simultaneous image acquisition for surface micro-structural information (UD), surface coating (MD), and overall topographic information (LD). Acceleration voltage: 1 kV
Intuitive Graphical User Interface
Enhanced Signal Display
- Customizable display modes.
- Single and Dual-monitor configurations.
- Simultaneous image display up to 4-ch (single) and 6-ch (dual).
- Chamber Scope and SEM MAP for optical stage navigation.
Highly Flexible Screen Layout
The software is capable of display 1, 2, or 4 signals including the chamber scope or SEM MAP on a single monitor.
Additionally, the operation panel can be customized to display submenus anywhere on the screen.
Dual Monitor
The first monitor can be used as a dedicated image display while the second monitor is utilized for operation.
Five detector images (UD, LD, UVD, MD, and PD-BSED) and SEM MAP of non-metallic inclusions in a steel specimen are displayed (left).
The screen s the operation panel menu and the thumbnail image window on one screen (right).
The dual-monitor configuration supports increased productivity with expanded w
Expandable Observation and Analysis
Large specimen chamber and large stage
The specimen chamber can accommodate a tall specimen of φ 200 mm or 80 mm in height and 18 accessory ports. The large stage travels 135 mm (X) x 100 mm (Y) and can accept up to 2 kg of specimen.(*) Large specimen or variable type of sub-stages can be easily mounted on the front-opening large stage door.
external view of the specimen chamber featuring 18 accessories por
external view of the stage. XY movable range: 135×100 mm
- (*)at 0° tilt
Camera Navigation(*)
Left: Picture of the sample captured by the camera equipped inside the chamber.
Right: Camera image transferred to the SEM MAP screen for navigation.
The camera navigation feature correlates an optical image to the target observation area.
The camera installed in the specimen chamber captures the specimen image at the time of specimen introduction. The image is transferred to the SEM MAP screen for a graphically driven navigation interface.
Camera navigation supports a maximum of φ 100 mm specimen.
- (*)
- Camera navigation function is optional
Detection System Enabling Dynamic Observation
The SU7000 supports observation under various environmental conditions. A variety of detectors (*) such as UVD and MD are selectable in addition to the PD-BSED for observation under low-vacuum conditions.
Detector Selection Under Low-Vacuum Conditions
Specimen: Fiber with metallic oxide
Left: MD (Backscattered electron) image
Right: UVD (SE image)
The oxide dispersion and fiber layering state are observed respectively.
Improved PD-BSED Response Speed
Left: Traditional PD-BSED response at the scan rate of 30 ms x 64 frames
Right: SU7000 PD-BSED image demonstrating improved response and image quality to expａnd in-situ observation capability
Specifications
| Image Resolution | 0.8 nm@15 kV |
|---|
| 0.9 nm@1 kV |
| Magnification | 20～2,000,000 x |
|---|
| Electron Optics | ZrO/W Schottky Emitter |
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| 0.1～30 kV (0.01 kV step) |
| Max. 200 nA |
| Detectors | UD（Upper Detector) |
|---|
| MD（Middle Detector） |
| LD（Lower Detector) |
| PD-BSED（Semiconductor type） |
| UVD (Ultra Variable Pressure Detector） |
| Variable Pressure(VP) Mode (Option) | 5～300 Pa |
|---|
| PD-BSED, UVD, UD, MD,LD |
| Specimen Stage | 5-axis Motor Drive |
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| 0～135 mm |
| 0～100 mm |
| 1.5～40 mm |
| -5～70° |
| 360° |
| Specimen Chamber | Max. φ200 mm, Max. 80mm Height |
|---|
| Monitor（Option) | 23 inch LCD（1,920×1,080) , supports dual monitors operation |
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| Image Display Mode | 1,280×960 pixels |
|---|
| 800×600 pixels |
| 800×600 pixels、1,280×960 pixels with dual monitors |
| 640×480 pixels |
| 640×480 pixels with dual monitors |
| Image Data Saving | 640×480、1,280×960、2,560×1,920、5,120×3,840、10,240×7,680 |
|---|
| Optional Accessories | Energy Dispersive X-ray Spectrometer (EDX) |
|---|
| Wavelength Dispersive X-ray Spectrometer (WDX) |
| Electron Backscattered Diffraction Detector (EBSD) |
| Cathodoluminescence System (CL) |
| Cryogenic Transfer System |
| Compatible with various types of sub-stages |
