非接觸式方塊電阻測試儀
昊量光電新推出用于導(dǎo)電薄膜和薄金屬層方塊電阻測量的非接觸式方阻測量儀EddyCus TF Series，這款非接觸式方塊電阻測量儀可以非接觸式實(shí)時測量，對導(dǎo)電薄膜和金屬方塊電阻精確測量，表征已被隱藏和封裝的導(dǎo)電層，并把測量數(shù)據(jù)保存和導(dǎo)出。
非接觸式方塊電阻測試儀主要測試對象：
鍍膜建筑玻璃，如LowE
顯示器，觸摸屏和平板顯示器
OLED和LED
智能玻璃
石墨烯層
光伏晶圓和電池
半導(dǎo)體晶片
金屬化層和晶圓金屬化
電池電極
導(dǎo)電涂布紙和導(dǎo)電紡織品
非接觸式單點(diǎn)方阻測試儀EddyCus TF Lab 2020SR
EddyCus TF Lab 2020SR是非接觸式單點(diǎn)薄層電阻測量系統(tǒng)。該裝置包含一個渦流傳感器組，感應(yīng)弱電流到導(dǎo)電薄膜和材料。試樣中的感應(yīng)電流產(chǎn)生與測量對象的片電阻相關(guān)的電磁場。電渦流技術(shù)不依賴于表面特征或形貌。此外，它不需要如已知的2或4點(diǎn)探針測試(2PP, 4PP)或霍爾效應(yīng)或范德波測量一樣進(jìn)行任何形式的充分的樣品接觸或備樣。它既不需要設(shè)置測試結(jié)構(gòu)，也不受表面粗糙度或非導(dǎo)電封裝或鈍化層的影響。此外，測量不會對被測薄膜產(chǎn)生物理影響。渦流儀器不存在機(jī)械磨損，使用壽命長。它的獨(dú)立性與接觸質(zhì)量和它的高速允許實(shí)現(xiàn)高重復(fù)性和準(zhǔn)確性，有利于在研發(fā)和測試實(shí)驗(yàn)室的各種薄膜的系統(tǒng)質(zhì)量保證。EddyCus工具可以由具有各種數(shù)據(jù)記錄和導(dǎo)出功能的SURAGUS軟件驅(qū)動，也可以由SURAGUS軟件開發(fā)套件驅(qū)動的客戶軟件驅(qū)動。
軟件和設(shè)備控制：
非接觸式方塊電阻測試儀產(chǎn)品規(guī)格表
| Measurement technology | Non-contact eddy current sensor |
| Substrates | Foils, glass, wafer, etc. |
| Substrate area | 8 inch / 204 mm x 204 mm (open on three sides) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 25 mm (defined by the thickest sample) |
| Thickness measurement range of metal films (e.g. copper) | 2 nm – 2 mm (in accordance with sheet resistance ()) |
| Device dimensions (w/h/d) | 11.4” x 5.5” x 17.5” / 290 mm x 140 mm x 445 mm |
| Weight | 10 kg |
| Further available features | Sheet resistance measurement / metal thickness monitor |
| | VLSR | LSR | MSR | HSR | VHSR |
|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy |
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% |
| Repeatability (2σ) | <> | <> | <> |
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistanc |
非接觸式方阻成像儀EddyCus TF Map 2530SR
EddyCus TF Map 2530SR是一種非接觸式薄層電阻映射系統(tǒng)。該設(shè)備配備了一個運(yùn)動的渦流傳感器，每次掃描可測量高達(dá)90000 (300 x 300)測量點(diǎn)的方塊電阻。由于這種技術(shù)不需要與標(biāo)本進(jìn)行物理接觸，該設(shè)備可以在飛行運(yùn)動中進(jìn)行測量。此外，它具有很高的準(zhǔn)確性，因?yàn)樗仟?dú)立于任何接觸質(zhì)量。樣品中測量點(diǎn)的高密度確保了沒有遺漏任何效果或缺陷。此外，綜合分析功能支持生產(chǎn)和研發(fā)實(shí)驗(yàn)室中各種薄膜的系統(tǒng)質(zhì)量保證。
產(chǎn)品規(guī)格：
| Measurement technology | Non-contact eddy current sensor |
| Substrates | Wafer, glass, foils etc. |
| Max. scanning area | 12 inch / 300 mm x 300 mm (larger upon request) |
| Edge effect correction / exclusion | 2 – 10 mm (depending on size, range, setup and requirements) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 15 mm (defined by the thickest sample) |
| Thickness measurement of metal films (e.g. aluminum, copper) | 2 nm – 2 mm (in accordance with sheet resistance ()) |
| Scanning pitch | 1 / 2.5 / 5 / 10 / 25 mm (other upon request) |
| Measurement points per time (square shaped samples) | 100 measurement points in 0.5 minutes
10,000 measurement points in 3 minutes |
| Scanning time | 8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch)
12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch) |
| Device dimensions (w/h/d) | 31.5” x 19.1” x 33.5” / 785 mm x 486 mm x 850 mm |
| Weight | 90 kg |
| Further available features | Metal thickness imaging, anisotropy and sheet resistance sensor |
| | VLSR | LSR | MSR | HSR | VHSR |
|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy |
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2,000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% |
| Repeatability (2σ) | <> | <> | <> |
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance |
便攜式方塊電阻測試儀
EddyCus TF便攜式1010SR專用于工業(yè)環(huán)境中的接觸片電阻測量。它使各種行業(yè)的手工質(zhì)量保證成為可能。
| Measurement technology | Eddy current sensor |
| Measurement mode | Realtime at constant distance / contact |
| Substrates | Glass, foils etc. |
| Substrate sizes | Flat samples > 150 mm x 150 mm (6 inch x 6 inch)
Curved editions are available for several applications (windshields etc.) |
| Measurement spot / high sensitivity zone | 40 mm diameter (1.6 inch) |
| Power | Lithium ion battery up to 20 h |
| Sheet resistance range (five setups available) | Type very low: 0.001 – 0.1 Ohm/sq
Type low: 0.04 – 0.1 Ohm/sq
Type standard: 0.3 – 30 Ohm/sq
Type high: 0.3 – 50 Ohm/sq
Type very high: 0.3 – 100 Ohm/sq |
| Thickness measurement of thin films (e.g. copper) | Additional feature, available range is 5 nm – 500 µm (in accordance with sheet resistance) |
| Emissivity range | Additional feature, available range is 0.003 – 0.5 |
| Accuracy (for planar solid surfaces, e.g. glass) | 0.001 – 50 Ohm/sq: <>
50 – 100 Ohm/sq: <> |
| Dlay | 2.8 inch colored touch screen |
| Device dimensions (w/h/d) | 3.5” x 7” x 1.9” / 87 mm x 178 mm x 48 mm |
| Weight | 340 g |
| Interfaces | Bluetooth (optional) + data center |
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